- Low vacuum operation up to 500 Pascals (approx. 4 Torr)
- Ultra-High-Resolution Digital Image Acquisition up to 16k x 16k pixels (16-bit video)
- Everhart-Thornley Secondary Electron Detector with YAG scintillator
- Retractable YAG Backscattered Electron Detector (UHV bellows retractor)
- Multi-ported specimen chamber, 230mm internal dia., 11+ ports
- Fully motorized compucentric 5-axis stage (X=80mm, Y=60mm, Z=47mm,
- Rotation=360°, Bidirectional tilt = -80° to +80°)
Instrumentation
Tescan Vega-3 SEM
EDAX Octane Elect EDS Detector
- LN-free Silicon Drift Detector (SDD) system with integrated Peltier cooling
- 30mm2 SDD sensor, 133eV resolution of better at MnK, Silicon Nitride thin window with detection to B
- Fixed detector position
- APEX™ EDS Analysis Software
Cressington 108 Gold Sputter Coater
Cressington 108A Carbon Coater
Please contact us for your specific preparation needs.